OLED Laser Ablation Tool
The Resonetics OLED Laser Ablation Series is a family of laser systems designed to meet advanced research, development, prototype, pilot production and manufacturing of Organic LEDs (OLED), Polymer LEDs (PLED) and flexible display devices. The OLED Laser Ablation system selectively patterns polymer & thin metal films on ITO/Glass and silicon substrates. The laser system exposes contact pads, wire bond pads as well as isolates and singulates individual display devices.
Download Technical Paper
The OLED Laser Ablation Series is developed to
- Maximize display life span
- Show a pathway to high volume automation
- Provide design versatility
Key System Features
- Proprietary debris nozzle designed to keep the active display area debris free
- Nitrogen process enclosure to prevent oxygen or water vapor from contaminating the display devices
- Robot effector interface to production equipment, such as polymer spinners and evaporators
- Single Stop Solution to handle from advanced research & development to high volume production
- Metrology, machine vision and auto-alignment options to maximize throughput
Laser Ablation Process

The ultra-violet laser beam etches away the overlying polymer or thin film metal from the substrate without damage. This is accomplished by a phenomena called "ablation" where the laser beam breaks the material's molecular bonds, resulting in the high velocity ejection of the "vaporized" materials into the collection path of the debris nozzle. This material removing process is done in a closed-cycle nitrogen environment to maximize the device lifespan.