Laser Systems
Resonetics Laser Systems Division designs and manufactures turnkey laser micromachining systems for the Scientific and Industrial markets.
In addition to the standard products, the Laser Systems Division offers laser system integration services to integrate a laser source (diodepumped solid state, excimer, CO2, picoseconds and femtosecond lasers) into a turnkey workstation for customer application
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CO2 Laser System
- High quality cuts and precise dimensional tolerances Welded frame for stability
- Market leader in laser micromachining systems
- State of the Art Design
- The Router design allows for high duty cycle processing of a wide variety of materials.
- Ability to perform non-linear profile cutting of circles, arcs or other complex patterns.
- Proven leader in non-contact laser processing of silicon wafers and other semiconductor materials.
- A small footprint design enables easy set-up and serviceability. The unique design of the Router
provides the maximum flexibility in any work
environment.
- Convenient programming software to allow rapid conversion of CAD drawings to finished parts.
Innovative Features
- Non-contact laser process to cut silicon wafers and other semiconductor materials
- Cuts arcs, circles, inside cut outs,rectangles or any complex pattern
- Narrow kerf width
- Typical cutting speed 0.2”/sec (5mm/sec)
- Class 1 safety enclosure
- Optical viewing system with CCTV monitor
- Optional wafer cassette auto loading/unloading
Applications
- Silicon
- Alumina (ceramic)
- Fused silica
- Aluminum nitride
- Gallium arsenide
- CVD Diamond
- PZT ceramic
- Thin metals and oxides
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Download Specification Sheet
Technical Data
System configuration:
Laser
| Type |
CO2-short pulsed |
| Output Power |
75W,150W,225W |
| Wavelength |
10.6μm |
| Repetition Rate |
10 kHz (max) |
Beam Delivery
| Spot size |
100μm (typical) |
| Focus lens |
Focal point 2.5” |
| Beam expander |
2x, 3x |
| Shutter |
External |
| Beam shaper |
Proprietary |
| Nozzle |
Coaxial air assist |
Motion System
| X,Y travel |
300mm x 300mm |
| Accuracy |
+/- 15mm |
| Repeatability |
+/- 10mm |
| Max velocity 1 |
00mm/sec |
Software
| System management |
Resonetics RPC software |
| Pre Process |
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| Software |
DXF to CNC Conversion |
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