End Point Detection

Examples of end point detection events include:

• Detecting when the laser has stripped the outer layer and has not damaged the underlying layer.
• Detecting when one material type has been ablated and a different material type has not been ablated.
• Detecting when a contact pad is conductive
• Detecting the depth of a blind hole or blind channel

Various technologies are deployed to detect the end of a process. Examples include:

• Plasma plume
• Capacitance
• Reflectivity

Plasma Detection System

End Point detection is method to know automatically when the end of a process has been reached. This method is deployed to help automate a manufacturing process and to eliminate subjective evaluation by an operator or inspector. This technology can lower manufacturing costs through the elimination of inspection and process labor.